Method for Analyzing the Measurement Error with Respect to Azimuth and Incident Angle for the Rotating Polarizer Analyzer Ellipsometer
نویسندگان
چکیده
We proposed a method to study the effects of azimuth and incident angle on accuracy stability rotating polarizer analyzer ellipsometer (RPAE) with bulk Au. The dielectric function was obtained at various angles in range 55°–80° analyzed spectrum principal angle. initial orientations polarizing elements were deviated by series act as azimuthal errors modes. spectroscopic measurements performed wavelength 300–800 nm an interval 10 nm. repeatedly-measured ellipsometric parameters determined constants recorded monochromatically wavelengths 350, 550, 750 mean absolute relative error employed evaluate quantitatively performance instrument. Apart from RPAE, experimental analysis implemented this work is also applicable other element ellipsometers.
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ژورنال
عنوان ژورنال: Crystals
سال: 2021
ISSN: ['2073-4352']
DOI: https://doi.org/10.3390/cryst11040349